High Sensitivity Toxic Gas Monitor for Phosphine, Silane, Diborane, Arsine, Disilane, Hydrogen Sulfide, Phosgene, Chlorine, and Hydrogen Selenide

Datasheet

The FP-260 is a highly sensitive toxic gas monitor using a gas detection cassette tape which is almost free of interference from other gases.

Since the detection tape responds only to the chemical reaction of the gas being measured, there is no interference from hydrogen or organic gases.

Its best application then is in monitoirng of the target gas at the outlet of an absorption scrubber, as well as in monitoring of the work environment for personnel safety.

Since the cassette can be replaced so quickly and easily by a one touch cassette method, detection of multiple gases is practical.

Features

Ideal for monitoring clean room in the semiconductor industry
Ideal for low gas concentration (ppb detection)
Interference-free detection
Easily replaceable plug-in tape cassette
Cassette tape remainder display included

Applications

Environmental Monitoring
Semiconductor Industry
Manufacturing

Detectable Gases and Detection Ranges

Gas	TLV value	Detection Range	Resolution
Phosphine (PH3)	300 ppb	0~900 ppb	5
Silane (SiH4)	5 ppb	0~15 ppm	0.25
Diborane (B2H6)	100 ppb	0~300 ppb	5
Arsine (AsH3)	50 ppb	0~150 ppb	1
Disilane (Si2H6)	5 ppm	0~10 ppm	0.1
Hydrogen Sulfide (H2S)	10 ppm	0~100 ppb	1
Phosgene (COCl2)	100 ppb	0~300 ppb	2
Chlorine (Cl2)	0.5 ppm	0~100 ppb	1
Hydrogen selenide (H2Se)	50 ppb	0~300 ppb	2

Specifications

Model	FP-260
Type	Desktop type, transportable
Detection principle	Photoelectric photometry method using paper tape cassette
Detection tape	Cassette type, in VHS style quick change cassette
Measuring gas and range	see table above
Accuracy	Within (+/- 20% of indication value +1 digit) at constant conditions
Tape operation time	1 month (with no alarm) - Tape remainder display and caution - Alarm display at tape end
Display	Digital LCD
Alarm Preset Value	Warning: 1/6 of full scale Alarm: 1/3 of full scale
Alarm Display	Lamp (warning-yellow, alarm-red) and buzzer
Alarm Output	Latching (standard) or non latching (option) - Dry contact 1A (warning) latching AC 125V, 0.5A - Dry contact 1A (alarm) latching AC 125V, 0.5A
Response Time	Within 60 seconds when exposed to gas concentration of 1.6 times alarm level.
Self diagnosis	Sensor trouble, flow fail, warning of tape end, tape exchange or tape damage, system trouble. Lamp and LCD message "C" contact (No voltage, self-diagnosis) rating : AC 125V, 0.5A
External output signal	4-20mA, max load resistance 300Ω (standard or Multiplex transmission (option)
Operating temperature & humidity	5~35°C (41~95°F), 30~90% RH (non condensing)
Sampling flow rate	Approx. 1.0 l/min
Gas Inlet	Outer diameter: 6mm, teflon tube with fitting
Power supply & power	100VAC, 115 VAC, 220VAC 50/60 Hz (35VA at Measurement, 60VA at feeding tape)
Dimensions & weight	Approx. 275(W) x 220(H) x 370(D)mm Approx. 12 kg
Standard Accessories	Gas detection cassette tape, Dust filter, Fuse (2A)

Specifications subject to change without notice.

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